Copy All Files and Folder from One Library to Another Library Subfolder on Diff Site Col Not Working

I'm trying to copy all files and folder from one library to another library subfolder between different site collections using the script from SharePoint Diary. It works for files after I modified

$TargetFileURL = $TargetFolder.ServerRelativeUrl+”/”+$SourceLibraryName+”/”+$SourceFile.Name

but struggling with subfolders from the source. They copy to the root without files in them. How can I make them copy to the same subfolder in the target library?

#Load SharePoint CSOM Assemblies
Add-Type -Path "C:\Program Files\Common Files\Microsoft Shared\Web Server Extensions\16\ISAPI\Microsoft.SharePoint.Client.dll"
Add-Type -Path "C:\Program Files\Common Files\Microsoft Shared\Web Server Extensions\16\ISAPI\Microsoft.SharePoint.Client.Runtime.dll"
 
Function Copy-Files
{
  param
    (
        [Parameter(Mandatory=$true)] [Microsoft.SharePoint.Client.Folder] $SourceFolder,
        [Parameter(Mandatory=$true)] [Microsoft.SharePoint.Client.Folder] $TargetFolder
    )
    Try {
        #Get all Files from the source folder
        $SourceFilesColl = $SourceFolder.Files
        $SourceFolder.Context.Load($SourceFilesColl)
        $SourceFolder.Context.ExecuteQuery()
 
        #Iterate through each file and copy
        Foreach($SourceFile in $SourceFilesColl)
        {
            #Get the source file
            $FileInfo = [Microsoft.SharePoint.Client.File]::OpenBinaryDirect($SourceFolder.Context, $SourceFile.ServerRelativeUrl)
             
            #Copy File to the Target location
            $TargetFileURL = $TargetFolder.ServerRelativeUrl+"/"+$SourceFile.Name
            [Microsoft.SharePoint.Client.File]::SaveBinaryDirect($TargetFolder.Context, $TargetFileURL, $FileInfo.Stream,$True)
 
            Write-host -f Green "Copied File '$($SourceFile.ServerRelativeUrl)' to '$TargetFileURL'"
        }
 
        #Process Sub Folders
        $SubFolders = $SourceFolder.Folders
        $SourceFolder.Context.Load($SubFolders)
        $SourceFolder.Context.ExecuteQuery()
        Foreach($SubFolder in $SubFolders)
        {
            If($SubFolder.Name -ne "Forms")
            {
                #Prepare Target Folder
                $TargetFolderURL = $SubFolder.ServerRelativeUrl -replace $SourceLibrary.RootFolder.ServerRelativeUrl, $TargetLibrary.RootFolder.ServerRelativeUrl
                Try {
                        $Folder=$TargetFolder.Context.web.GetFolderByServerRelativeUrl($TargetFolderURL)
                        $TargetFolder.Context.load($Folder)
                        $TargetFolder.Context.ExecuteQuery()
                    }
                catch {
                        #Create Folder
                        if(!$Folder.Exists)
                        {
                            $TargetFolderURL
                            $Folder=$TargetFolder.Context.web.Folders.Add($TargetFolderURL)
                            $TargetFolder.Context.Load($Folder)
                            $TargetFolder.Context.ExecuteQuery()
                            Write-host "Folder Added:"$SubFolder.Name -f Yellow
                        }
                    }
                #Call the function recursively
                Copy-Files -SourceFolder $SubFolder -TargetFolder $Folder
            }
        }
    }
    Catch {
        write-host -f Red "Error Copying File!" $_.Exception.Message
    }
}
 
#Set Parameter values
$SourceSiteURL="https://crescent.sharePoint.com/sites/sales"
$TargetSiteURL="https://crescent.sharepoint.com/sites/ops"
 
$SourceLibraryName="Project Documents"
$TargetLibraryName="Documents"
 
#Setup Credentials to connect
$Cred= Get-Credential
$Credentials = New-Object Microsoft.SharePoint.Client.SharePointOnlineCredentials($Cred.Username, $Cred.Password)
 
#Setup the contexts
$SourceCtx = New-Object Microsoft.SharePoint.Client.ClientContext($SourceSiteURL)
$SourceCtx.Credentials = $Credentials
$TargetCtx = New-Object Microsoft.SharePoint.Client.ClientContext($TargetSiteURL)
$TargetCtx.Credentials = $Credentials
      
#Get the source library and Target Libraries
$SourceLibrary = $SourceCtx.Web.Lists.GetByTitle($SourceLibraryName)
$SourceCtx.Load($SourceLibrary)
$SourceCtx.Load($SourceLibrary.RootFolder)
 
$TargetLibrary = $TargetCtx.Web.Lists.GetByTitle($TargetLibraryName)
$TargetCtx.Load($TargetLibrary)
$TargetCtx.Load($TargetLibrary.RootFolder)
$TargetCtx.ExecuteQuery()
 
#Call the function
Copy-Files -SourceFolder $SourceLibrary.RootFolder -TargetFolder $TargetLibrary.RootFolder